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Mechanics of Microelectromechanical Systems

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This book provides an in-depth analysis of microelectromechanical systems (MEMS) from a mechanical engineering perspective. It explores energy transformation in MEMS, offering tools for modeling and designing microsystems. The work includes analytical and simplified formulas for flexible components and examines actuation/sensing methods with practical examples.

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Mechanics of Microelectromechanical Systems, Ephrahim Garcia, Nicolae Lobontiu

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2014
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