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Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.
Nákup knihy
Precision Nanometrology, Wei Gao
- Jazyk
- Rok vydania
- 2014
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- Titul
- Precision Nanometrology
- Podtitul
- Sensors and Measuring Systems for Nanomanufacturing
- Jazyk
- anglicky
- Autori
- Wei Gao
- Vydavateľ
- Springer London
- Rok vydania
- 2014
- Väzba
- mäkká
- Počet strán
- 372
- ISBN13
- 9781447157434
- Kategórie
- Príroda všeobecne
- Anotácia
- Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.