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First book on modelling of the processing techniques for microsystems Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation Includes supplementary material: sn. pub/extras
Nákup knihy
Modelling of microfabrication systems, Raja Nassar
- Jazyk
- Rok vydania
- 2003
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- Titul
- Modelling of microfabrication systems
- Jazyk
- anglicky
- Autori
- Raja Nassar
- Vydavateľ
- Springer
- Vydavateľ
- 2003
- ISBN10
- 3540002529
- ISBN13
- 9783540002529
- Kategórie
- Technika / Strojárenstvo
- Anotácia
- First book on modelling of the processing techniques for microsystems Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation Includes supplementary material: sn. pub/extras